美国ASTM D5127电子及半导体工业用纯水水质要求
英国ASTM D5127网上及半导化工业级纯净水地表水规范
项目 ꦕ |
TypeE-1 |
TypeE-1.1 |
TypeE-1.2 |
TyPeE-2 |
TyPeE-3 |
TyPeE-4 |
线宽(μm) |
1.0-0.5 |
0.5-0.25 |
0.25-0.18 |
5-1 |
>5 |
- |
电阻率♏ |
18.2 |
18.2 |
18.2 |
17.5 |
12 |
0.5 |
供暖系统(EU/ml) |
0.03 |
0.03 |
0.03 |
0.25 |
- |
- |
TOC(μg/L) |
5 |
2 |
1 |
50 |
300 |
1000 |
析出氧DO(μg/L) |
1 |
1 |
1 |
- |
- |
- |
多效蒸发残余物(μg/L) |
1 |
0.5 |
0.1 |
- |
- |
- |
水分子(μm)(SEM测试) |
|
|
|
|
♐ |
𒊎 |
0.1—0.2 |
1000 |
1000 |
200 |
|
🍌 |
🐻 |
0.2—0.5 |
500 |
500 |
l00 |
3000 |
꧟ |
♉ |
0.5—1.0 |
50 |
50 |
1 |
|
10000 |
🌱 |
ꦡ10 |
- |
- |
- |
|
🌠 |
100000 |
水分子(μm)(在线免费验测) |
♛ |
𒉰 |
꧂ |
|
𝓰 |
💧 |
0.05—0.1 |
500 |
500 |
100 |
|
ꦆ |
🌜 |
0.1—0.2 |
300 |
300 |
50 |
|
🔯 |
💧 |
0.2—0.3 |
🎀 50 |
50 |
20 |
|
🎃 |
ܫ |
0.3—0.5 |
ღ 20 |
20 |
10 |
|
🐲 |
🍬 |
>0.5 |
🐈 4 |
🀅 4 |
🐬 1 |
|
ꦗ |
𝓀 |
病菌𓂃 |
🎃 |
🐼 |
𝐆 |
|
♏ |
𒊎 |
100ml Sample |
ℱ 1 |
ꦓ 1 |
💟 1 |
|
✅ |
💙 |
♋ 1L Sample |
🐽 1 |
𒁃 1 |
0.1 |
10 |
10000 |
100000 |
硅(μ🐭m) |
❀ |
ꦫ |
𒊎 |
|
ﷺ |
🤪 |
总硅♐ |
🐽 3 |
0.5 |
0.5 |
10 |
50 |
1000 |
融解硅 |
ཧ 1 |
0.1 |
0.05 |
|
ꦉ |
𓃲 |
亚铁离子(μg/L) |
ꦛ |
♓ |
🥂 |
|
🌠 |
|
🧸 NH4 |
0.1 |
0.1 |
0.05 |
- |
- |
|
🌟 Br |
🍸0.1 |
0.05 |
0.02 |
- |
🍌- |
|
Cl♉ |
💦0.l |
0.05 |
0.02 |
1 |
10 |
1000 |
🎃 F |
0.1 |
0.05 |
0.03 |
- |
- |
- |
𓃲 N03 |
ꩲ0.1 |
0.05 |
0.02 |
1 |
♚5 |
500 |
꧟ N02 |
𓂃0.l |
0.05 |
0.02 |
- |
- |
- |
🐠 P04 |
0.1 |
0.05 |
0.02 |
1 |
𒈔5 |
500 |
🀅 S04 |
0.1 |
0.💫05 |
0.02 |
1 |
☂5 |
500 |
🍨 Al |
0.05 |
0.02 |
0.005 |
- |
- |
- |
🌳 Ba |
0.05 |
0.02 |
0.001 |
- |
- |
- |
🌠 B |
0.05 |
0.02 |
0.005 |
- |
- |
- |
ဣ Ca |
0.05 |
0.02 |
0.002 |
- |
- |
- |
🐷 Cr |
0.05 |
0.02 |
0.002 |
- |
- |
- |
🌼 Cu |
0.05 |
0.02 |
0.002 |
1 |
ꦛ2 |
500 |
💫 Fe |
0.05 |
0.02 |
0.002 |
- |
- |
- |
ౠ Pb |
0.05 |
0.02 |
0.005 |
- |
- |
- |
🐎 Li |
0.05 |
0.02 |
0.003 |
- |
- |
- |
🤡 Mg |
0.05 |
0.02 |
0.002 |
- |
- |
- |
🦋 Mn |
0.05 |
0.02 |
0.002 |
- |
- |
- |
🌜 K |
0.05 |
0.02 |
0.002 |
1 |
🔜2 |
500 |
🌠 K |
0.05 |
0.02 |
0.005 |
2 |
👍5 |
500 |
🐟 Na |
0.05 |
0.02 |
0.005 |
1 |
ꦯ5 |
1000 |
🌱 Sr |
0.05 |
0.02 |
0.00l |
- |
- |
🌃 - |
🐟 zi |
0.05 |
0.02 |
0.002 |
1 |
🌊5 |
500 |
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